Ultra-High-Density Arrays of Defect-Free AlN Nanorods

JEOL 2100 TEM

  • Dr Michele (Shelly) Conroy

SEM images reveal the hexagonal symmetry of the close packed AlN nanorods grown by MOCVD. The TEM image shows the small 5nm spacing between the rods resulting in the highest reported fill factor (98%) of nanorod templates to date.

Ultra-High-Density Arrays of Defect-Free AlN Nanorods